There's a very easy and natural way of using Anzahl that you didn't mention:
You just use Anzahl and then, directly following, the noun in nominative or genitive case. It can be used just like a measurement unit, e.g. "ein Kilo Erbsen" or "drei Paletten Radios".
Eine große Anzahl Zelte wird aufgebaut.
Die Jugendlichen schliefen in einer großen Anzahl Zelte, die direkt hinter dem Strand aufgestellt worden waren.
Comments on the options that were mentioned in the question:
It's not wrong, but I would avoid this and use:
This is the preposition to use if you want to use a preposition for some reason.
You use this if you want to refer to a definite set of [noun] with a definite article, like in:
Die Anzahl der Fahrraddiebstähle, bei denen kein Täter ermittelt werden kann, steigt seit Jahren.
equivalent to Anzahl, there's no real difference. The use without article or prepositions (eine Zahl Zelte) is uncommon with "Zahl" though.
Yes, you can create that or use it if you know that it is already in use, but you would normally only create that if you really want it to be a term that's going to be used at least a few times. For example, if you write a study comparing scout summer camps, you might want to refer to their "Zeltzahl" in your statistics.
This is derived from the meaning "a row of ..." and it doesn't talk about a number at all, it's basically synonymous to "some". You can also just use this with a noun in nominative: "eine Reihe Zelte".