All Questions
Tagged with manufacturing-process microfabrication
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Is a cylindrical GAAfet fabricated with lithography and etching?
The GAAfet, aka the surrounding gate transistor (SGT), is basically a FinFET that surrounds the channel on all 4 sides instead of 3. However, a lot of examples show a cylinder instead of a rectangle.
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Why solvent cleaning of clean wafers includes de-ionized (DI) water?
Solvent (or solution) cleaning of clean wafers includes acetone wash, isopropyl alcohol (IPA) wash and de-ionized (DI) water wash, followed by drying in nitrogen.
What's the purpose of using DI water?...
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How are few-nanometer multigate MOSFETs fabricated?
Intel and IMEC came up with multigate MOSFET designs with channels as narrow as new nanometers. Which methods/techniques/machines are used to pattern/fabricate such small features?
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