The electrical efficiency of charging a capacitor from a constant voltage source through a resistance is given by
$$\eta = \frac{\text{energy transferred to capacitor}}{\text{energy transferred to capcitor + energy dissipated}} =\frac{V_{C(0)}+V_{C(1)}}{2V_{source}}$$
where the capacitor is charged from \$V_{C(0)}\$ to \$V_{C(1)}\$ from a source of voltage \$V_{source}\$.
If a capacitor is charged from 0 V to \$V_{source}\$ through a resistance, then the efficiency is 50%. However, if the capacitor is charged from say 90% of \$V_{source}\$ to \$V_{source}\$, then the charging efficiency will be 95%. The ratio of energy that is dissipated to the energy that is store in the capacitor is only 1:19. So, when using capacitors as energy storage, and when charging them from a constant voltage source through a resistance, it is generally advisable to keep the voltage on the capacitor near the source voltage, to keep capacitor charging losses low.
The loss due to capacitor charging is only one of the loss factors in a capacitive charge pump. However, the above equation tells us that our converter will be more efficient if we ensure that the voltage ripple across the capacitors is low. The voltage ripple will decrease if we increase the switching frequency, and also if we increase the capacitance. The voltage ripple will increases as we increase the current drawn from the converter.
Although they are not new, MOSFETs often permit higher frequency switching than BJTs, and lower conduction losses. Similarly, MOSFETs may be used as active rectifiers, which reduces rectifier forward conduction losses. MOSFETs have the drawback, however, that at high frequencies, gate current losses are high. Another drawback of MOSFETs in capacitive charge pumps is the external components required for driving gates. A voltage doubler using 2 MOSFETs for primary switching and two MOSFETs as low conduction loss rectifiers requires 4 gate drive circuits. This adds complexity to a design. However, complexity entails neither low power, nor low efficiency.