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Decoupling NO production and UV emission intensity over the E-H mode transition in a low-pressure inductively coupled plasma device
Authors:
Lars Schücke,
Angie Natalia Torres Segura,
Ihor Korolov,
Peter Awakowicz,
Andrew R. Gibson
Abstract:
A low-pressure double-inductively coupled plasma device is used to study the fundamental plasma parameters, plasma chemistry, and UV photon emission from the first excited state of nitric oxide, NO(A), in gas mixtures of nitrogen and oxygen. In addition to the gas mixture, rf power and gas pressure are varied, and the E-H mode transition of the inductively coupled plasma is studied specifically. T…
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A low-pressure double-inductively coupled plasma device is used to study the fundamental plasma parameters, plasma chemistry, and UV photon emission from the first excited state of nitric oxide, NO(A), in gas mixtures of nitrogen and oxygen. In addition to the gas mixture, rf power and gas pressure are varied, and the E-H mode transition of the inductively coupled plasma is studied specifically. The gas temperature and UV photon emission are measured by optical emission spectroscopy (OES), the absolute density of the nitric oxide electronic ground state by laser-induced fluorescence (LIF), as well as electron density and electron temperature by a multipole resonance probe (MRP). A simple collisional-radiative model for UV emission from NO(A) is developed, which takes the measured densities of ground state nitric oxide and electrons, as well as the electron temperature and neutral gas temperature, as input parameters. The results reveal the links between the absolute densities of ground state nitric oxide, the excitation of this species driven by electron impact and collisions with nitrogen metastables, quenching of the nitrogen metastables, and the resulting UV photon emission rate. The density of ground state nitric oxide is shown to increase with power, while the discharge remains in E-mode, and to decrease significantly with the transition into H-mode, when sufficient rf power is deposited in the discharge. Despite the lower densities of ground state nitric oxide in H-mode, the UV photon emission intensity increases continuously with higher rf powers and over the E-H transition. This effect is shown to be caused by increased excitation of NO(A) by nitrogen metastables in H-mode, which is sufficient to overcompensate the decrease in ground state nitric oxide density.
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Submitted 5 July, 2024;
originally announced July 2024.
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The role of flow field dynamics in enhancing volatile organic compound conversion in a surface dielectric barrier discharge system
Authors:
Alexander Böddecker,
Maximilian Passmann,
Angie Natalia Torres Segura,
Arisa Bodnar,
Felix Awakowicz,
Timothy Oppotsch,
Martin Muhler,
Peter Awakowicz,
Andrew R. Gibson,
Ihor Korolov,
Thomas Mussenbrock
Abstract:
This study investigates the correlation between flow fields induced by a surface dielectric barrier discharge (SDBD) system and its application for the volatile organic compound (VOC) gas conversion process. As a benchmark molecule, the conversion of n-butane is monitored using flame ionization detectors, while the flow field is analysed using planar particle image velocimetry. Two individual setu…
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This study investigates the correlation between flow fields induced by a surface dielectric barrier discharge (SDBD) system and its application for the volatile organic compound (VOC) gas conversion process. As a benchmark molecule, the conversion of n-butane is monitored using flame ionization detectors, while the flow field is analysed using planar particle image velocimetry. Two individual setups are developed to facilitate both conversion measurement and investigation of induced fluid dynamics. Varying the gap distance between two SDBD electrode plates for three different n-butane mole fractions reveals local peaks in relative conversion around gap distances of 16 mm to 22 mm, indicating additional spatially dependent effects. The lowest n-butane mole fractions exhibit the highest relative conversion, while the highest n-butane mole fraction conversion yields the greatest number of converted molecules per unit time. Despite maintaining constant energy density, the relative conversion exhibits a gradual decrease with increasing distances. The results of the induced flow fields reveal distinct vortex structures at the top and bottom electrodes, which evolve in size and shape as the gap distances increase. These vortices exhibit gas velocity magnitudes approximately seven times higher than the applied external gas flow velocity. Vorticity and turbulent kinetic energy analyses provide insights into these structures' characteristics and their impact on gas mixing. A comparison of line profiles through the centre of the vortices shows peaks in the middle gap region for the same gap distances, correlating with the observed peaks in conversion. These findings demonstrate a correlation between induced flow dynamics and the gas conversion process, bridging plasma actuator studies with the domain of chemical plasma gas conversion.
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Submitted 3 May, 2024;
originally announced May 2024.
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Numerical investigation of vacuum ultra-violet emission in Ar/O$_2$ inductively coupled plasmas
Authors:
Michel Osca Engelbrecht,
Jonathan Jenderny,
Henrik Hylla,
Dominik Filla,
Peter Awakowicz,
Ihor Korolov,
Christopher P. Ridgers,
Andrew R. Gibson
Abstract:
Controlling fluxes of vacuum ultraviolet (VUV) radiation is important in a number of industrial and biomedical applications of low pressure plasma sources because, depending on the process, VUV radiation may be desired, required to a certain degree, or unwanted. In this work, the emission of VUV radiation from O atoms is investigated in low-pressure Ar/O$_2$ inductively coupled plasma via numerica…
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Controlling fluxes of vacuum ultraviolet (VUV) radiation is important in a number of industrial and biomedical applications of low pressure plasma sources because, depending on the process, VUV radiation may be desired, required to a certain degree, or unwanted. In this work, the emission of VUV radiation from O atoms is investigated in low-pressure Ar/O$_2$ inductively coupled plasma via numerical simulations. For this purpose, a self-consistent Ar/O$_2$ plasma-chemical reaction scheme has been implemented in a zero dimensional plasma chemical kinetics model and is used to investigate VUV emission from excited O atoms (3s $^5$S$^0_2$) and 3s $^3$S$^0_1$) at 130 and 135 nm. The model is extensively compared with experimental measurements of absolute VUV emission intensities, electron densities and Ar excited state densities. In addition, VUV emission intensities are investigated as a function of pressure, Ar/O$_2$ mixture, and power deposition and the dominant reaction pathways leading to VUV emission are identified and described. In general terms, absolute VUV emission intensities increase with power and oxygen fraction over the ranges investigated and peak emission intensities are found for pressures between 5-50 Pa. The emission is dominated by the 130 nm resonance line from the decay of the O(3s $^3$S$^0_1$) state to the ground state. Besides, at low pressure (0.3-1 Pa), the flux of VUV photons to surfaces is much lower than that of positive ions, whereas VUV fluxes dominate at higher pressure, $\gtrsim$5-50 Pa depending on O$_2$ fraction. Finally, oxygen atom fluxes to surfaces are, in general, larger than those of VUV photons for the parameter space investigated.
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Submitted 12 February, 2024;
originally announced February 2024.
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Interactions between flow fields induced by surface dielectric barrier discharge arrays
Authors:
Alexander Böddecker,
Maximilian Passmann,
Sebastian Wilczek,
Lars Schücke,
Ihor Korolov,
Romuald Skoda,
Thomas Mussenbrock,
Andrew R. Gibson,
Peter Awakowicz
Abstract:
This study investigates the flow field induced by a surface dielectric barrier discharge (SDBD) system, known for its efficient pollution remediation of volatile organic compounds (VOCs). We aim to understand the flow dynamics that contribute to the high conversion observed in similar systems. Experimental techniques, including schlieren imaging and particle image velocimetry (PIV), applied with h…
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This study investigates the flow field induced by a surface dielectric barrier discharge (SDBD) system, known for its efficient pollution remediation of volatile organic compounds (VOCs). We aim to understand the flow dynamics that contribute to the high conversion observed in similar systems. Experimental techniques, including schlieren imaging and particle image velocimetry (PIV), applied with high temporal resolution, were used to analyse the flow field. Complementary, fluid simulations are employed to investigate the coupling between streamer and gas dynamics. Results show distinct fluid field behaviours for different electrode configurations, which differ in geometric complexity. The fluid field analysis of the most basic electrode design revealed behaviours commonly observed in actuator studies. The simulation results indicate the local information about the electron density as well as different temporal phases of the fluid flow. The electrode design with mostly parallel grid line structures exhibits confined vortices near the surface. In contrast, an electrode design also used in previous studies, is shown to promote strong gas transport through extended vortex structures, enhancing gas mixing and potentially explaining the high conversion observed.
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Submitted 28 July, 2023;
originally announced July 2023.
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Electron power absorption in capacitively coupled neon-oxygen plasmas: a comparison of experimental and computational results
Authors:
A. Derzsi,
P. Hartmann,
M. Vass,
B. Horváth,
M. Gyulai,
I. Korolov,
J. Schulze,
Z. Donkó
Abstract:
Phase Resolved Optical Emission Spectroscopy (PROES) measurements combined with 1d3v Particle-in-Cell/Monte Carlo Collisions (PIC/MCC) simulations are used to study the electron power absorption and excitation/ionization dynamics in capacitively coupled plasmas (CCPs) in mixtures of neon and oxygen gases. The study is performed for a geometrically symmetric CCP reactor with a gap length of 2.5 cm…
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Phase Resolved Optical Emission Spectroscopy (PROES) measurements combined with 1d3v Particle-in-Cell/Monte Carlo Collisions (PIC/MCC) simulations are used to study the electron power absorption and excitation/ionization dynamics in capacitively coupled plasmas (CCPs) in mixtures of neon and oxygen gases. The study is performed for a geometrically symmetric CCP reactor with a gap length of 2.5 cm at a driving frequency of 10~MHz and a peak-to-peak voltage of 350 V. The pressure of the gas mixture is varied between 15 Pa and 500 Pa, while the neon/oxygen concentration is tuned between 10% and 90%. For all discharge conditions, the spatio-temporal distribution of the electron-impact excitation rate from the Ne ground state into the Ne $\rm{2p^53p_0}$ state measured by PROES and obtained from PIC/MCC simulations show good qualitative agreement. Based on the emission/excitation patterns, multiple operation regimes are identified. Localized bright emission features at the bulk boundaries, caused by local maxima in the electronegativity are found at high pressures and high O$_2$ concentrations. The relative contributions of the ambipolar and the Ohmic electron power absorption are found to vary strongly with the discharge parameters: the Ohmic power absorption is enhanced by both the high collisionality at high pressures and the high electronegativity at low pressures. In the wide parameter regime covered in this study, the PROES measurements are found to accurately represent the ionization dynamics, i.e., the discharge operation mode. This work represents also a successful experimental validation of the discharge model developed for neon-oxygen CCPs.
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Submitted 13 May, 2022;
originally announced May 2022.
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Zero-dimensional and pseudo-one-dimensional models of atmospheric-pressure plasma jet in binary and ternary mixtures of oxygen and nitrogen with helium background
Authors:
Youfan He,
Patrick Preissing,
David Steuer,
Maximilian Klich,
Volker Schulz-von der Gathen,
Marc Böke,
Ihor Korolov,
Julian Schulze,
Vasco Guerra,
Ralf Peter Brinkmann,
Efe Kemaneci
Abstract:
A zero-dimensional (volume-averaged) and a pseudo-one-dimensional (plug-flow) model are developed to investigate atmospheric-pressure plasma jet devices operated with He, He/O$_2$, He/N$_2$ and He/N$_2$/O$_2$ mixtures. The models are coupled with the Boltzmann equation under the two-term approximation to self-consistently calculate the electron energy distribution function (EEDF). The simulation r…
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A zero-dimensional (volume-averaged) and a pseudo-one-dimensional (plug-flow) model are developed to investigate atmospheric-pressure plasma jet devices operated with He, He/O$_2$, He/N$_2$ and He/N$_2$/O$_2$ mixtures. The models are coupled with the Boltzmann equation under the two-term approximation to self-consistently calculate the electron energy distribution function (EEDF). The simulation results are verified against spatially resolved model calculations and validated against a wide variety of measurement data. The nitric oxide (NO) concentration is thoroughly characterized for a variation of the gas mixture ratio, helium flow rate and absorbed power. The concentration measurements at low power are better captured by the simulation with a larger hypothetical "effective" rate coefficient value for the reactive quenching N$_2$(A$^3Σ$,B$^3Π$) + O($^3$P) $\to$ NO + N($^2$D). This suggests that the NO production at low power is also covered by the species N$_2$(A$^3Σ$,B$^3Π$;v>0) and multiple higher N$_2$ electronically excited states instead of only N$_2$(A$^3Σ$,B$^3Π$;v=0) in this quenching. Furthermore, the O($^3$P) density measurements under the same operation conditions are also better predicted by the simulations with a consideration of the aforementioned hypothetical rate coefficient value. It is found that the contribution of the vibrationally excited nitrogen molecules N$_2$(v$\geqslant$13) to the net NO formation rate gains more significance at higher power. The vibrational distribution functions (VDFs) of O$_2$(v<41) and N$_2$(v<58) are investigated. The sensitivity of the zero-dimensional model with respect to a variation of the VDF resolutions, wall reaction probabilities and synthetic air impurity levels is presented. The simulated plasma properties are sensitive to the variation especially for a feeding gas mixture containing nitrogen.
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Submitted 12 May, 2021;
originally announced May 2021.
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Energy efficiency of voltage waveform tailoring for the generation of excited species in RF plasma jets operated in He/N$_2$ mixtures
Authors:
Ihor Korolov,
Zoltán Donkó,
Gerrit Hübner,
Yue Liu,
Thomas Mussenbrock,
Julian Schulze
Abstract:
Based on Tunable Diode Laser Absorption Spectroscopy (TDLAS) measurements of the spatially averaged and peak helium metastable atom densities in a capacitively coupled micro atmospheric pressure plasma jet operated in He/N$_2$ mixtures, the energy efficiency of metastable species (He-I 2$^3$S$_1$) generation is compared for three different scenarios: single frequency operation at (i) 13.56 MHz and…
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Based on Tunable Diode Laser Absorption Spectroscopy (TDLAS) measurements of the spatially averaged and peak helium metastable atom densities in a capacitively coupled micro atmospheric pressure plasma jet operated in He/N$_2$ mixtures, the energy efficiency of metastable species (He-I 2$^3$S$_1$) generation is compared for three different scenarios: single frequency operation at (i) 13.56 MHz and (ii) 54.12 MHz, and Voltage Waveform Tailoring (VWT) at (iii) "valleys"-waveforms synthesized from four consecutive harmonics of 13.56 MHz. For each case, the dissipated power is measured based on a careful calibration procedure of voltage and current measurements. The results are compared to PIC/MCC simulation results and very good agreement is found. The computational results show that the choice of the surface coefficients in the simulation is important to reproduce the experimental data correctly. Due to the enhanced control of the spatio-temporal electron power absorption dynamics and, thus, of the electron energy distribution function by VWT, this approach does not only provide better control of the generation of excited and reactive species compared to single frequency excitation, but in case of helium metastables the energy efficiency is also shown to be significantly higher in case of VWT.
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Submitted 14 April, 2021;
originally announced April 2021.
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Electron heating mode transitions in radio-frequency driven micro atmospheric pressure plasma jets in He/O$_{2}$: A fluid dynamics approach
Authors:
Yue Liu,
Ihor Korolov,
Torben Hemke,
Lena Bischoff,
Gerrit Hübner,
Julian Schulze,
Thomas Mussenbrock
Abstract:
A two-dimensional fluid model is used to investigate the electron heating dynamics and the production of neutral species in a capacitively coupled radio-frequency micro atmospheric pressure helium plasma jet -- specifically the COST jet -- with a small oxygen admixture. Electron heating mode transitions are found to be induced by varying the driving voltage amplitude and the O$_2$ concentration nu…
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A two-dimensional fluid model is used to investigate the electron heating dynamics and the production of neutral species in a capacitively coupled radio-frequency micro atmospheric pressure helium plasma jet -- specifically the COST jet -- with a small oxygen admixture. Electron heating mode transitions are found to be induced by varying the driving voltage amplitude and the O$_2$ concentration numerically and experimentally. The helium metastable density, and the charged species densities are highly relevant to the electron heating dynamics. By analyzing the creation and destruction mechanisms of the negative ions, we find that the generation of negative ions strongly depends on the O$_2$ concentration. The increase of the electronegativity with the increasing O$_2$ concentration leads to an enhancement of the bulk drift electric field. The distributions of the different neutral species densities along the direction of the gas flow inside the jet, as well as in the effluent differ a lot due to the relevant chemical reaction rates and the effect of the gas flow. The simulated results show that a fluid model can be an effective tool for qualitative investigations of micro atmospheric pressure plasma jets.
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Submitted 24 February, 2021; v1 submitted 7 February, 2021;
originally announced February 2021.
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Electron swarm parameters in C$_2$H$_2$, C$_2$H$_4$ and C$_2$H$_6$: measurements and kinetic calculations
Authors:
N R Pinhão,
D Loffhagen,
M Vass,
P Hartmann,
I Korolov,
S Dujko,
D Bošnjaković,
Z Donkó
Abstract:
This work presents swarm parameters of electrons (the bulk drift velocity, the bulk longitudinal component of the diffusion tensor, and the effective ionization frequency) in C$_2$H$_n$, with $n =$ 2, 4 and 6, measured in a scanning drift tube apparatus under time-of-flight conditions over a wide range of the reduced electric field, 1 Td $\leq\,E/N\,\leq$ 1790 Td (1 Td = $10^{-21}$ Vm$^2$). The ef…
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This work presents swarm parameters of electrons (the bulk drift velocity, the bulk longitudinal component of the diffusion tensor, and the effective ionization frequency) in C$_2$H$_n$, with $n =$ 2, 4 and 6, measured in a scanning drift tube apparatus under time-of-flight conditions over a wide range of the reduced electric field, 1 Td $\leq\,E/N\,\leq$ 1790 Td (1 Td = $10^{-21}$ Vm$^2$). The effective steady-state Townsend ionization coefficient is also derived from the experimental data. A kinetic simulation of the experimental drift cell allows estimating the uncertainties introduced in the data acquisition procedure and provides a correction factor to each of the measured swarm parameters. These parameters are compared to results of previous experimental studies, as well as to results of various kinetic swarm calculations: solutions of the electron Boltzmann equation under different approximations (multiterm and density gradient expansions) and Monte Carlo simulations. The experimental data are consistent with most of the swarm parameters obtained in earlier studies. In the case of C$_2$H$_2$, the swarm calculations show that the thermally excited vibrational population should not be neglected, in particular, in the fitting of cross sections to swarm results.
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Submitted 22 November, 2019;
originally announced November 2019.
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Experimental observation and simulation of the equilibration of electron swarms in a scanning drift tube
Authors:
Z. Donko,
P. Hartmann,
I. Korolov,
V. Jeges,
D. Bosnjakovic,
S. Dujko
Abstract:
We investigate the spatially and temporally resolved electron kinetics in a homogeneous electric field in argon gas, in the vicinity of an emitting boundary. This (transient) region, where the electron swarm exhibits non-equilibrium character with energy gain and loss processes taking place at separate positions (in space and time), is monitored experimentally in a scanning drift tube apparatus. D…
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We investigate the spatially and temporally resolved electron kinetics in a homogeneous electric field in argon gas, in the vicinity of an emitting boundary. This (transient) region, where the electron swarm exhibits non-equilibrium character with energy gain and loss processes taking place at separate positions (in space and time), is monitored experimentally in a scanning drift tube apparatus. Depending on the strength of the reduced electric field we observe the equilibration of the swarm over different length scales, beyond which the energy gain and loss mechanism becomes locally balanced and transport properties become spatially invariant. The evolution of the electron swarm in the experimental apparatus is also described by Monte Carlo simulations, of which the results are in good agreement with the experimental observations, over the domains of the reduced electric field and the gas pressure covered.
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Submitted 3 May, 2019;
originally announced May 2019.
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Self-diffusion in two-dimensional quasi-magnetized rotating dusty plasmas
Authors:
Peter Hartmann,
Jorge C. Reyes,
Evdokiya G. Kostadinova,
Lorin S. Matthews,
Truell W. Hyde,
Ranna U. Masheyeva,
Karlygash N. Dzhumagulova,
Tlekkabul S. Ramazanov,
Torben Ott,
Hanno Kählert,
Michael Bonitz,
Ihor Korolov,
Zoltán Donkó
Abstract:
The self-diffusion phenomenon in a two-dimensional dusty plasma at extremely strong (effective) magnetic fields is studied experimentally and by means of molecular dynamics simulations. In the experiment the high magnetic field is introduced by rotating the particle cloud and observing the particle trajectories in a co-rotating frame, which allows reaching effective magnetic fields up to 3000 Tesl…
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The self-diffusion phenomenon in a two-dimensional dusty plasma at extremely strong (effective) magnetic fields is studied experimentally and by means of molecular dynamics simulations. In the experiment the high magnetic field is introduced by rotating the particle cloud and observing the particle trajectories in a co-rotating frame, which allows reaching effective magnetic fields up to 3000 Tesla. The experimental results confirm the predictions of the simulations: (i) super-diffusive behavior is found at intermediate time-scales and (ii) the dependence of the self-diffusion coefficient on the magnetic field is well reproduced.
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Submitted 26 December, 2018;
originally announced December 2018.
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Striations in electronegative capacitively coupled radio-frequency plasmas: effects of the pressure, voltage, and electrode gap
Authors:
Yong-Xin Liu,
Ihor Korolov,
Edmund Schüngel,
You-Nian Wang,
Zoltán Donkó,
Julian Schulze
Abstract:
Capacitively coupled radio-frequency (CCRF) CF_4 plasmas have been found to exhibit a self-organized striated structure at operating conditions, where the plasma is strongly electronegative and the ion-ion plasma in the bulk region (largely composed of CF_3^+ and F^- ions) resonates with the excitation frequency. In this work we explore the effects of the gas pressure, the RF voltage, and the elec…
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Capacitively coupled radio-frequency (CCRF) CF_4 plasmas have been found to exhibit a self-organized striated structure at operating conditions, where the plasma is strongly electronegative and the ion-ion plasma in the bulk region (largely composed of CF_3^+ and F^- ions) resonates with the excitation frequency. In this work we explore the effects of the gas pressure, the RF voltage, and the electrode gap on this striated structure by Phase Resolved Optical Emission Spectroscopy and Particle-In-Cell/Monte Carlo Collisions simulations. The measured electronic excitation patterns at different external parameters show a good general agreement with the spatio-temporal plots of the ionization rate obtained from the simulations. For a fixed driving frequency the minima of the CF_3^+ and F^- ion densities (between the density peaks in the bulk) are comparable and independent of other external parameters. However, the ion density maxima generally increase as a function of the pressure or RF voltage, leading to the enhanced spatial modulation of plasma parameters. The striation gap (defined as the distance between two ion density peaks) is approximately inversely proportional to the pressure, while it exhibits a weak dependence on the RF voltage and the electrode gap. A transition between the striated and non-striated modes can be observed by changing either the pressure or the RF voltage; for 13.56 MHz and 18 MHz driving frequencies we present a phase diagram as a function of the pressure and voltage amplitude parameters.
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Submitted 17 May, 2017;
originally announced May 2017.
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Striations in electronegative capacitively coupled radio-frequency plasmas: analysis of the pattern formation and the effect of the driving frequency
Authors:
Yong-Xin Liu,
Ihor Korolov,
Edmund Schüngel,
You-Nian Wang,
Zoltán Donkó,
Julian Schulze
Abstract:
Self-organized striated structures of the plasma emission have recently been observed in capacitive radio-frequency CF4 plasmas by Phase Resolved Optical Emission Spectroscopy (PROES) and their formation was analyzed and understood by Particle in Cell / Monte Carlo Collision (PIC/MCC) simulations [Y.-X. Liu, et al. Phys. Rev. Lett. 116, 255002 (2016)]. The striations were found to result from the…
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Self-organized striated structures of the plasma emission have recently been observed in capacitive radio-frequency CF4 plasmas by Phase Resolved Optical Emission Spectroscopy (PROES) and their formation was analyzed and understood by Particle in Cell / Monte Carlo Collision (PIC/MCC) simulations [Y.-X. Liu, et al. Phys. Rev. Lett. 116, 255002 (2016)]. The striations were found to result from the periodic generation of double layers due to the modulation of the densities of positive and negative ions responding to the externally applied RF potential. In this work, an in-depth analysis of the formation of striations is given, as well as the effect of the driving frequency on the plasma parameters, such as the spatially modulated charged species densities, the electric field, and the electron power absorption is studied by PROES measurements, PIC/MCC simulations, and an ion-ion plasma model. The measured spatio-temporal electronic excitation patterns at different driving frequencies show a high degree of consistency with the simulation results. The striation gap (i.e., the distance between two ion density maxima) is found to be inversely proportional to the driving frequency. In the presence of striations the minimum(CF_3^+, F^-) ion densities in the bulk region exhibit an approximately quadratic increase with the driving frequency. For these densities, the eigenfrequency of the ion-ion plasma is near the driving frequency, indicating that a resonance occurs between the positive and negative ions and the oscillating electric field inside the plasma bulk. The maximum ion densities in the plasma bulk are found not to exhibit a simple dependence on the driving frequency, since these ion densities are abnormally enhanced within a certain frequency range due to the ions being focused into the "striations" by the spatially modulated electric field inside the bulk region.
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Submitted 17 March, 2017;
originally announced March 2017.
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Electron transport parameters in CO$_2$: scanning drift tube measurements and kinetic computations
Authors:
M. Vass,
I. Korolov,
D. Loffhagen,
N. Pinhao,
Z. Donko
Abstract:
This work presents transport coefficients of electrons (bulk drift velocity, longitudinal diffusion coefficient, and effective ionization frequency) in CO2 measured under time-of-flight conditions over a wide range of the reduced electric field, 15Td <= E/N <= 2660Td in a scanning drift tube apparatus. The data obtained in the experiments are also applied to determine the effective steady-state To…
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This work presents transport coefficients of electrons (bulk drift velocity, longitudinal diffusion coefficient, and effective ionization frequency) in CO2 measured under time-of-flight conditions over a wide range of the reduced electric field, 15Td <= E/N <= 2660Td in a scanning drift tube apparatus. The data obtained in the experiments are also applied to determine the effective steady-state Townsend ionization coefficient. These parameters are compared to the results of previous experimental studies, as well as to results of various kinetic computations: solutions of the electron Boltzmann equation under different approximations (multiterm and density gradient expansions) and Monte Carlo simulations. The experimental data extend the range of E/N compared with previous measurements and are consistent with most of the transport parameters obtained in these earlier studies. The computational results point out the range of applicability of the respective approaches to determine the different measured transport properties of electrons in CO2. They demonstrate as well the need for further improvement of the electron collision cross section data for CO2 taking into account the present experimental data.
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Submitted 17 March, 2017; v1 submitted 22 November, 2016;
originally announced November 2016.
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Experimental observation and computational analysis of striations in electronegative capacitively coupled radio-frequency plasmas
Authors:
Yong-Xin Liu,
Edmund Schuengel,
Ihor Korolov,
Zoltan Donko,
You-Nian Wang,
Julian Schulze
Abstract:
Self-organized spatial structures in the light emission from the ion-ion capacitive RF plasma of a strongly electronegative gas (CF4) are observed experimentally for the first time. Their formation is analyzed and understood based on particle-based kinetic simulations. These "striations" are found to be generated by the resonance between the driving radio-frequency and the eigenfrequency of the io…
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Self-organized spatial structures in the light emission from the ion-ion capacitive RF plasma of a strongly electronegative gas (CF4) are observed experimentally for the first time. Their formation is analyzed and understood based on particle-based kinetic simulations. These "striations" are found to be generated by the resonance between the driving radio-frequency and the eigenfrequency of the ion-ion plasma (derived from an analytical model) that establishes a modulation of the electric field, the ion densities, as well as the energy gain and loss processes of electrons in the plasma. The growth of the instability is followed by the numerical simulations.
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Submitted 1 June, 2016;
originally announced June 2016.
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A scanning drift tube apparatus for spatio-temporal mapping of electron swarms
Authors:
I. Korolov,
M. Vass,
N. Kh. Bastykova,
Z. Donko
Abstract:
A "scanning" drift tube apparatus, capable of mapping of the spatio-temporal evolution of electron swarms, developing between two plane electrodes under the effect of a homogeneous electric field, is presented. The electron swarms are initiated by photoelectron pulses and the temporal distributions of the electron flux are recorded while the electrode gap length (at a fixed electric field strength…
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A "scanning" drift tube apparatus, capable of mapping of the spatio-temporal evolution of electron swarms, developing between two plane electrodes under the effect of a homogeneous electric field, is presented. The electron swarms are initiated by photoelectron pulses and the temporal distributions of the electron flux are recorded while the electrode gap length (at a fixed electric field strength) is varied. Operation of the system is tested and verified with argon gas, the measured data are used for the evaluation of the electron bulk drift velocity. The experimental results for the space-time maps of the electron swarms - presented here for the first time - also allow clear observation of deviations from hydrodynamic transport. The swarm maps are also reproduced by particle simulations.
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Submitted 13 May, 2016;
originally announced May 2016.
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A computationally assisted spectroscopic technique to measure secondary electron emission coefficients in radio frequency plasmas
Authors:
M. Daksha,
B. Berger,
E. Schuengel,
I. Korolov,
A. Derzsi,
M. Koepke,
Z. Donko,
J. Schulze
Abstract:
A Computationally Assisted Spectroscopic Technique to measure secondary electron emission coefficients ($γ$-CAST) in capacitively-coupled radio-frequency plasmas is proposed. This non-intrusive, sensitive diagnostic is based on a combination of Phase Resolved Optical Emission Spectroscopy and particle-based kinetic simulations. In such plasmas (under most conditions in electropositive gases) the s…
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A Computationally Assisted Spectroscopic Technique to measure secondary electron emission coefficients ($γ$-CAST) in capacitively-coupled radio-frequency plasmas is proposed. This non-intrusive, sensitive diagnostic is based on a combination of Phase Resolved Optical Emission Spectroscopy and particle-based kinetic simulations. In such plasmas (under most conditions in electropositive gases) the spatio-temporally resolved electron-impact excitation/ionization rate features two distinct maxima adjacent to each electrode at different times within each RF period. While one maximum is the consequence of the energy gain of electrons due to sheath expansion, the second maximum is produced by secondary electrons accelerated towards the plasma bulk by the sheath electric field at the time of maximum voltage drop across the adjacent sheath. Due to these different excitation/ionization mechanisms, the ratio of the intensities of these maxima is very sensitive to the secondary electron emission coefficient $γ$. This sensitvity, in turn, allows $γ$ to be determined by comparing experimental excitation profiles and simulation data obtained with various $γ$-coefficients. The diagnostic, tested here in a geometrically symmetric argon discharge, yields an effective secondary electron emission coefficient of $γ= 0.066 \pm 0.01$ for stainless steel electrodes.
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Submitted 11 April, 2016;
originally announced April 2016.
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Electron heating via the self-excited plasma series resonance in geometrically symmetric multi-frequency capacitive plasmas
Authors:
E. Schuengel,
S. Brandt,
Z. Donko,
I. Korolov,
A. Derzsi,
J. Schulze
Abstract:
The self-excitation of Plasma Series Resonance (PSR) oscillations plays an important role in the electron heating dynamics in Capacitively Coupled Radio Frequency (CCRF) plasmas. In a combined approach of PIC/MCC simulations and a theoretical model based on an equivalent circuit, we investigate the self-excitation of PSR oscillations and their effect on the electron heating in geometrically symmet…
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The self-excitation of Plasma Series Resonance (PSR) oscillations plays an important role in the electron heating dynamics in Capacitively Coupled Radio Frequency (CCRF) plasmas. In a combined approach of PIC/MCC simulations and a theoretical model based on an equivalent circuit, we investigate the self-excitation of PSR oscillations and their effect on the electron heating in geometrically symmetric CCRF plasmas driven by multiple consecutive harmonics. The discharge symmetry is controlled via the Electrical Asymmetry Effect, i.e. by varying the total number of harmonics and tuning the phase shifts between them. It is demonstrated that PSR oscillations will be self-excited under both symmetric and asymmetric conditions, if (i) the charge-voltage relation of the plasma sheaths deviates from a simple quadratic behavior and if (ii) the inductance of the plasma bulk exhibits a temporal modulation. These two effects have been neglected up to now, but we show that they must be included in the model in order to properly describe the nonlinear series resonance circuit and reproduce the self-excitation of PSR oscillations, which are observed in the electron current density resulting from simulations of geometrically symmetric CCRF plasmas. Furthermore, the effect of the PSR self-excitation on the discharge current and the plasma properties, such as the potential profile, is illustrated by applying Fourier analysis. High frequency oscillations in the entire spectrum between the applied frequencies and the local electron plasma frequency are observed. As a consequence, the electron heating is strongly enhanced by the presence of PSR oscillations.
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Submitted 11 February, 2016;
originally announced February 2016.
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On the self-excitation mechanisms of Plasma Series Resonance oscillations in single- and multi-frequency capacitive discharges
Authors:
Edmund Schuengel,
Steven Brandt,
Ihor Korolov,
Aranka Derzsi,
Zoltan Donko,
Julian Schulze
Abstract:
The self-excitation of plasma series resonance (PSR) oscillations is a prominent feature in the current of low pressure capacitive radio frequency (RF) discharges. This resonance leads to high frequency oscillations of the charge in the sheaths and enhances electron heating. Up to now, the phenomenon has only been observed in asymmetric discharges. There, the nonlinearity in the voltage balance, w…
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The self-excitation of plasma series resonance (PSR) oscillations is a prominent feature in the current of low pressure capacitive radio frequency (RF) discharges. This resonance leads to high frequency oscillations of the charge in the sheaths and enhances electron heating. Up to now, the phenomenon has only been observed in asymmetric discharges. There, the nonlinearity in the voltage balance, which is necessary for the self-excitation of resonance oscillations with frequencies above the applied frequencies, is caused predominantly by the quadratic contribution to the charge-voltage relation of the plasma sheaths. Using PIC/MCC simulations of single- and multi- frequency capacitive discharges and an equivalent circuit model, we demonstrate that other mechanisms such as a cubic contribution to the charge-voltage relation of the plasma sheaths and the time dependent bulk electron plasma frequency can cause the self-excitation of PSR oscillations, as well. These mechanisms have been neglected in previous models, but are important for the theoretical description of the current in symmetric or weakly asymmetric discharges.
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Submitted 10 February, 2016;
originally announced February 2016.
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Customized ion flux-energy distribution functions in capacitively coupled plasmas by voltage waveform tailoring
Authors:
E. Schuengel,
Z. Donko,
P. Hartmann,
A. Derzsi,
I. Korolov,
J. Schulze
Abstract:
We propose a method to generate a single peak at a distinct energy in the ion flux-energy distribution function (IDF) at the electrode surfaces in capacitively coupled plasmas. The technique is based on the tailoring of the driving voltage waveform, i.e. adjusting the phases and amplitudes of the applied harmonics, to optimize the accumulation of ions created by charge exchange collisions and thei…
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We propose a method to generate a single peak at a distinct energy in the ion flux-energy distribution function (IDF) at the electrode surfaces in capacitively coupled plasmas. The technique is based on the tailoring of the driving voltage waveform, i.e. adjusting the phases and amplitudes of the applied harmonics, to optimize the accumulation of ions created by charge exchange collisions and their subsequent acceleration by the sheath electric field. The position of the peak (i.e. the ion energy) and the flux of the ions within the peak of the IDF can be controlled in a wide domain by tuning the parameters of the applied RF voltage waveform, allowing optimization of various applications where surface reactions are induced at particular ion energies.
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Submitted 8 February, 2016;
originally announced February 2016.
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The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas
Authors:
J. Schulze,
Z. Donko,
A. Derzsi,
I. Korolov,
E. Schuengel
Abstract:
We investigate the electron heating dynamics in electropositive argon and helium capacitively coupled RF discharges driven at 13.56 MHz by Particle in Cell simulations and by an analytical model. The model allows to calculate the electric field outside the electrode sheaths, space and time resolved within the RF period. Electrons are found to be heated by strong ambipolar electric fields outside t…
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We investigate the electron heating dynamics in electropositive argon and helium capacitively coupled RF discharges driven at 13.56 MHz by Particle in Cell simulations and by an analytical model. The model allows to calculate the electric field outside the electrode sheaths, space and time resolved within the RF period. Electrons are found to be heated by strong ambipolar electric fields outside the sheath during the phase of sheath expansion in addition to classical sheath expansion heating. By tracing individual electrons we also show that ionization is primarily caused by electrons that collide with the expanding sheath edge multiple times during one phase of sheath expansion due to backscattering towards the sheath by collisions. A synergistic combination of these different heating events during one phase of sheath expansion is required to accelerate an electron to energies above the threshold for ionization. The ambipolar electric field outside the sheath is found to be time modulated due to a time modulation of the electron mean energy caused by the presence of sheath expansion heating only during one half of the RF period at a given electrode. This time modulation results in more electron heating than cooling inside the region of high electric field outside the sheath on time average. If an electric field reversal is present during sheath collapse, this time modulation and, thus, the asymmetry between the phases of sheath expansion and collapse will be enhanced. We propose that the ambipolar electron heating should be included in models describing electron heating in capacitive RF plasmas.
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Submitted 4 February, 2016;
originally announced February 2016.
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Breakdown in hydrogen and deuterium gases in static and radio-frequency fields
Authors:
I. Korolov,
Z. Donkó
Abstract:
We report the results of a combined experimental and modeling study of the electrical breakdown of hydrogen and deuterium in static (DC) and radio-frequency (RF, 13.56 MHz) electric fields. For the simulations of the breakdown events, simplified models are used and only electrons are traced by Monte Carlo simulation. The experimental DC Paschen curve of hydrogen is used for the determination of th…
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We report the results of a combined experimental and modeling study of the electrical breakdown of hydrogen and deuterium in static (DC) and radio-frequency (RF, 13.56 MHz) electric fields. For the simulations of the breakdown events, simplified models are used and only electrons are traced by Monte Carlo simulation. The experimental DC Paschen curve of hydrogen is used for the determination of the effective secondary electron emission coefficient. A very good agreement between the experimental and the calculated RF breakdown characteristics for hydrogen is found. For deuterium, on the other hand, presently available cross section sets do not allow a reproduction of RF breakdown characteristics.
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Submitted 29 December, 2015;
originally announced December 2015.
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Kinetic Interpretation of Resonance Phenomena in Low Pressure Capacitively Coupled Radio Frequency Plasmas
Authors:
S. Wilczek,
J. Trieschmann,
D. Eremin,
R. P. Brinkmann,
J. Schulze,
E. Schuengel,
A. Derzsi,
I. Korolov,
P. Hartmann,
Z. Donkó,
T. Mussenbrock
Abstract:
The kinetic origin of resonance phenomena in capacitively coupled radio frequency plasmas is discovered based on particle-based numerical simulations. The analysis of the spatio-temporal distributions of plasma parameters such as the densities of hot and cold electrons, as well as the conduction and displacement currents reveals the mechanism of the formation of multiple electron beams during shea…
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The kinetic origin of resonance phenomena in capacitively coupled radio frequency plasmas is discovered based on particle-based numerical simulations. The analysis of the spatio-temporal distributions of plasma parameters such as the densities of hot and cold electrons, as well as the conduction and displacement currents reveals the mechanism of the formation of multiple electron beams during sheath expansion. The interplay between highly energetic beam electrons and low energetic bulk electrons is identified as the physical origin of the excitation of harmonics in the current.
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Submitted 20 July, 2015;
originally announced July 2015.
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Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas
Authors:
A. Derzsi,
I. Korolov,
E. Schuengel,
Z. Donko,
J. Schulze
Abstract:
In most PIC/MCC simulations of radio frequency capacitively coupled plasmas (CCPs) several simplifications are made: (i) fast neutrals are not traced, (ii) heavy particle induced excitation and ionization are neglected, (iii) secondary electron emission from boundary surfaces due to neutral particle impact is not taken into account, and (iv) the secondary electron emission coefficient is assumed t…
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In most PIC/MCC simulations of radio frequency capacitively coupled plasmas (CCPs) several simplifications are made: (i) fast neutrals are not traced, (ii) heavy particle induced excitation and ionization are neglected, (iii) secondary electron emission from boundary surfaces due to neutral particle impact is not taken into account, and (iv) the secondary electron emission coefficient is assumed to be constant, i.e. independent of the incident particle energy and the surface conditions. Here we question the validity of these simplifications under conditions typical for plasma processing applications. We study the effects of including fast neutrals and using realistic energy-dependent secondary electron emission coefficients for ions and fast neutrals in simulations of CCPs operated in argon at 13.56 MHz and at neutral gas pressures between 3 Pa and 100 Pa. We find a strong increase of the plasma density and the ion flux to the electrodes under most conditions, if these processes are included realistically in the simulation. The sheath widths are found to be significantly smaller and the simulation is found to diverge at high pressures for high voltage amplitudes in qualitative agreement with experimental findings. By switching individual processes on and off in the simulation we identify their individual effects on the ionization dynamics and plasma parameters. We conclude that fast neutrals and energy-dependent secondary electron emission coefficients must be included in simulations of CCPs in order to yield realistic results.
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Submitted 5 February, 2015; v1 submitted 10 November, 2014;
originally announced November 2014.
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The effect of the driving frequency on the confinement of beam electrons and plasma density in low pressure capacitive discharges
Authors:
S. Wilczek,
J. Trieschmann,
J. Schulze,
E. Schuengel,
R. P. Brinkmann,
A. Derzsi,
I. Korolov,
Z. Donkó,
T. Mussenbrock
Abstract:
The effect of changing the driving frequency on the plasma density and the electron dynamics in a capacitive radio-frequency argon plasma operated at low pressures of a few Pa is investigated by Particle in Cell/Monte Carlo Collisions simulations and analytical modeling. In contrast to previous assumptions the plasma density does not follow a quadratic dependence on the driving frequency in this n…
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The effect of changing the driving frequency on the plasma density and the electron dynamics in a capacitive radio-frequency argon plasma operated at low pressures of a few Pa is investigated by Particle in Cell/Monte Carlo Collisions simulations and analytical modeling. In contrast to previous assumptions the plasma density does not follow a quadratic dependence on the driving frequency in this non-local collisionless regime. Instead, a step-like increase at a distinct driving frequency is observed. Based on the analytical power balance model, in combination with a detailed analysis of the electron kinetics, the density jump is found to be caused by an electron heating mode transition from the classical $α$-mode into a low density resonant heating mode characterized by the generation of two energetic electron beams at each electrode per sheath expansion phase. These electron beams propagate through the bulk without collisions and interact with the opposing sheath. In the low density mode, the second beam is found to hit the opposing sheath during its collapse. Consequently, a high number of energetic electrons is lost at the electrodes resulting in a poor confinement of beam electrons in contrast to the classical $α$-mode observed at higher driving frequencies. Based on the analytical model this modulated confinement quality and the related modulation of the energy lost per electron lost at the electrodes is demonstrated to cause the step-like change of the plasma density. The effects of a variation of the electrode gap, the neutral gas pressure, the electron sticking and secondary electron emission coefficients of the electrodes on this step-like increase of the plasma density are analyzed based on the simulation results.
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Submitted 29 January, 2015; v1 submitted 20 October, 2014;
originally announced October 2014.
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Kinetic simulation of the sheath dynamics in the intermediate radio-frequency regime
Authors:
M. Shihab,
A. T. Elgendy,
I. Korolov,
A. Derzsi,
J. Schulze,
D. Eremin,
T. Mussenbrock,
Z. Donkó,
R. P. Brinkmann
Abstract:
The dynamics of temporally modulated plasma boundary sheaths is studied in the intermediate radio frequency regime where the applied radio frequency and the ion plasma frequency are comparable. Two kinetic simulation codes are employed and their results are compared. The first code is a realization of the well-known scheme, Particle-In-Cell with Monte Carlo collisions (PIC/MCC) and simulates the e…
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The dynamics of temporally modulated plasma boundary sheaths is studied in the intermediate radio frequency regime where the applied radio frequency and the ion plasma frequency are comparable. Two kinetic simulation codes are employed and their results are compared. The first code is a realization of the well-known scheme, Particle-In-Cell with Monte Carlo collisions (PIC/MCC) and simulates the entire discharge, a planar radio frequency capacitively coupled plasma (RF-CCP) with an additional heating source. The second code is based on the recently published scheme Ensemble-in-Spacetime (EST); it resolves only the sheath and requires the time resolved voltage across and the ion flux into the sheath as input. Ion inertia causes a temporal asymmetry (hysteresis) of the sheath charge-voltage relation; also other ion transit time effects are found. The two codes are in good agreement, both with respect to the spatial and temporal dynamics of the sheath and with respect to the ion energy distributions at the electrodes. It is concluded that the EST scheme may serve as an efficient post-processor for fluid or global simulations and for measurements: It can rapidly and accurately calculate ion distribution functions even when no genuine kinetic information is available.
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Submitted 29 May, 2013;
originally announced May 2013.
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The influence of the secondary electron induced asymmetry on the Electrical Asymmetry Effect in capacitively coupled plasmas
Authors:
Ihor Korolov,
Aranka Derzsi,
Zoltan Donko,
Julian Schulze
Abstract:
In geometrically symmetric capacitive radio-frequency plasmas driven by two consecutive harmonics a dc self-bias can be generated as a function of the phase shift between the driving frequencies via the Electrical Asymmetry Effect (EAE). Recently the Secondary Electron Asymmetry Effect (SEAE) was discovered (T. Lafleur, P. Chabert and J.P. Booth, J. Phys. D: Appl. Phys. 46 135201 (2013)): unequal…
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In geometrically symmetric capacitive radio-frequency plasmas driven by two consecutive harmonics a dc self-bias can be generated as a function of the phase shift between the driving frequencies via the Electrical Asymmetry Effect (EAE). Recently the Secondary Electron Asymmetry Effect (SEAE) was discovered (T. Lafleur, P. Chabert and J.P. Booth, J. Phys. D: Appl. Phys. 46 135201 (2013)): unequal secondary electron emission coefficients at both electrodes were found to induce an asymmetry in single frequency capacitive plasmas. Here, we investigate the simultaneous presence of both effects, i.e. a dual-frequency plasma driven by two consecutive harmonics with different electrode materials. We find, that the superposition of the EAE and the SEAE is non-linear, i.e. the asymmetries generated by each individual effect do not simply add up. The control ranges of the dc self-bias and the mean ion energy can be enlarged, if both effects are combined.
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Submitted 23 May, 2013;
originally announced May 2013.
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Temperature dependence of binary and ternary recombination of H3+ ions with electron
Authors:
J. Glosik,
R. Plasil,
I. Korolov,
T. Kotrik,
O. Novotny,
P. Hlavenka,
P. Dohnal,
J. Varju,
V. Kokoouline,
C. H. Greene
Abstract:
We study binary and the recently discovered process of ternary He-assisted recombination of H3+ ions with electrons in a low temperature afterglow plasma. The experiments are carried out over a broad range of pressures and temperatures of an afterglow plasma in a helium buffer gas. Binary and He-assisted ternary recombination are observed and the corresponding recombination rate coefficients are…
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We study binary and the recently discovered process of ternary He-assisted recombination of H3+ ions with electrons in a low temperature afterglow plasma. The experiments are carried out over a broad range of pressures and temperatures of an afterglow plasma in a helium buffer gas. Binary and He-assisted ternary recombination are observed and the corresponding recombination rate coefficients are extracted for temperatures from 77 K to 330 K. We describe the observed ternary recombination as a two-step mechanism: First, a rotationally-excited long-lived neutral molecule H3* is formed in electron-H3+ collisions. Second, the H3* molecule collides with a helium atom that leads to the formation of a very long-lived Rydberg state with high orbital momentum. We present calculations of the lifetimes of H3* and of the ternary recombination rate coefficients for para and ortho-H3+. The calculations show a large difference between the ternary recombination rate coefficients of ortho- and para-H3+ at temperatures below 300 K. The measured binary and ternary rate coefficients are in reasonable agreement with the calculated values.
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Submitted 9 March, 2009;
originally announced March 2009.
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Recombination of H3+ Ions in the Afterglow of a He-Ar-H2 Plasma
Authors:
J. Glosik,
I. Korolov,
R. Plasil,
O. Novotny,
T. Kotrik,
P. Hlavenka,
J. Varju,
Chris H. Greene,
V. Kokoouline,
I. A. Mikhailov
Abstract:
Recombination of H3+ with electrons was studied in a low temperature plasma in helium. The plasma recombination rate is driven by two body, H3+ + e, and three-body, H3+ + e + He, processes with the rate coefficients 7.5x10^{-8}cm3/s and 2.8x10^{-25}cm6/s correspondingly at 260K. The two-body rate coefficient is in excellent agreement with results from storage ring experiments and theoretical cal…
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Recombination of H3+ with electrons was studied in a low temperature plasma in helium. The plasma recombination rate is driven by two body, H3+ + e, and three-body, H3+ + e + He, processes with the rate coefficients 7.5x10^{-8}cm3/s and 2.8x10^{-25}cm6/s correspondingly at 260K. The two-body rate coefficient is in excellent agreement with results from storage ring experiments and theoretical calculations. We suggest that the three-body recombination involves formation of highly excited Rydberg neutral H3 followed by an l- or m- changing collision with He. Plasma electron spectroscopy indicates the presence of H3.
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Submitted 11 October, 2007;
originally announced October 2007.
