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Decoupling NO production and UV emission intensity over the E-H mode transition in a low-pressure inductively coupled plasma device
Authors:
Lars Schücke,
Angie Natalia Torres Segura,
Ihor Korolov,
Peter Awakowicz,
Andrew R. Gibson
Abstract:
A low-pressure double-inductively coupled plasma device is used to study the fundamental plasma parameters, plasma chemistry, and UV photon emission from the first excited state of nitric oxide, NO(A), in gas mixtures of nitrogen and oxygen. In addition to the gas mixture, rf power and gas pressure are varied, and the E-H mode transition of the inductively coupled plasma is studied specifically. T…
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A low-pressure double-inductively coupled plasma device is used to study the fundamental plasma parameters, plasma chemistry, and UV photon emission from the first excited state of nitric oxide, NO(A), in gas mixtures of nitrogen and oxygen. In addition to the gas mixture, rf power and gas pressure are varied, and the E-H mode transition of the inductively coupled plasma is studied specifically. The gas temperature and UV photon emission are measured by optical emission spectroscopy (OES), the absolute density of the nitric oxide electronic ground state by laser-induced fluorescence (LIF), as well as electron density and electron temperature by a multipole resonance probe (MRP). A simple collisional-radiative model for UV emission from NO(A) is developed, which takes the measured densities of ground state nitric oxide and electrons, as well as the electron temperature and neutral gas temperature, as input parameters. The results reveal the links between the absolute densities of ground state nitric oxide, the excitation of this species driven by electron impact and collisions with nitrogen metastables, quenching of the nitrogen metastables, and the resulting UV photon emission rate. The density of ground state nitric oxide is shown to increase with power, while the discharge remains in E-mode, and to decrease significantly with the transition into H-mode, when sufficient rf power is deposited in the discharge. Despite the lower densities of ground state nitric oxide in H-mode, the UV photon emission intensity increases continuously with higher rf powers and over the E-H transition. This effect is shown to be caused by increased excitation of NO(A) by nitrogen metastables in H-mode, which is sufficient to overcompensate the decrease in ground state nitric oxide density.
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Submitted 5 July, 2024;
originally announced July 2024.
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The role of flow field dynamics in enhancing volatile organic compound conversion in a surface dielectric barrier discharge system
Authors:
Alexander Böddecker,
Maximilian Passmann,
Angie Natalia Torres Segura,
Arisa Bodnar,
Felix Awakowicz,
Timothy Oppotsch,
Martin Muhler,
Peter Awakowicz,
Andrew R. Gibson,
Ihor Korolov,
Thomas Mussenbrock
Abstract:
This study investigates the correlation between flow fields induced by a surface dielectric barrier discharge (SDBD) system and its application for the volatile organic compound (VOC) gas conversion process. As a benchmark molecule, the conversion of n-butane is monitored using flame ionization detectors, while the flow field is analysed using planar particle image velocimetry. Two individual setu…
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This study investigates the correlation between flow fields induced by a surface dielectric barrier discharge (SDBD) system and its application for the volatile organic compound (VOC) gas conversion process. As a benchmark molecule, the conversion of n-butane is monitored using flame ionization detectors, while the flow field is analysed using planar particle image velocimetry. Two individual setups are developed to facilitate both conversion measurement and investigation of induced fluid dynamics. Varying the gap distance between two SDBD electrode plates for three different n-butane mole fractions reveals local peaks in relative conversion around gap distances of 16 mm to 22 mm, indicating additional spatially dependent effects. The lowest n-butane mole fractions exhibit the highest relative conversion, while the highest n-butane mole fraction conversion yields the greatest number of converted molecules per unit time. Despite maintaining constant energy density, the relative conversion exhibits a gradual decrease with increasing distances. The results of the induced flow fields reveal distinct vortex structures at the top and bottom electrodes, which evolve in size and shape as the gap distances increase. These vortices exhibit gas velocity magnitudes approximately seven times higher than the applied external gas flow velocity. Vorticity and turbulent kinetic energy analyses provide insights into these structures' characteristics and their impact on gas mixing. A comparison of line profiles through the centre of the vortices shows peaks in the middle gap region for the same gap distances, correlating with the observed peaks in conversion. These findings demonstrate a correlation between induced flow dynamics and the gas conversion process, bridging plasma actuator studies with the domain of chemical plasma gas conversion.
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Submitted 3 May, 2024;
originally announced May 2024.
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Numerical investigation of vacuum ultra-violet emission in Ar/O$_2$ inductively coupled plasmas
Authors:
Michel Osca Engelbrecht,
Jonathan Jenderny,
Henrik Hylla,
Dominik Filla,
Peter Awakowicz,
Ihor Korolov,
Christopher P. Ridgers,
Andrew R. Gibson
Abstract:
Controlling fluxes of vacuum ultraviolet (VUV) radiation is important in a number of industrial and biomedical applications of low pressure plasma sources because, depending on the process, VUV radiation may be desired, required to a certain degree, or unwanted. In this work, the emission of VUV radiation from O atoms is investigated in low-pressure Ar/O$_2$ inductively coupled plasma via numerica…
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Controlling fluxes of vacuum ultraviolet (VUV) radiation is important in a number of industrial and biomedical applications of low pressure plasma sources because, depending on the process, VUV radiation may be desired, required to a certain degree, or unwanted. In this work, the emission of VUV radiation from O atoms is investigated in low-pressure Ar/O$_2$ inductively coupled plasma via numerical simulations. For this purpose, a self-consistent Ar/O$_2$ plasma-chemical reaction scheme has been implemented in a zero dimensional plasma chemical kinetics model and is used to investigate VUV emission from excited O atoms (3s $^5$S$^0_2$) and 3s $^3$S$^0_1$) at 130 and 135 nm. The model is extensively compared with experimental measurements of absolute VUV emission intensities, electron densities and Ar excited state densities. In addition, VUV emission intensities are investigated as a function of pressure, Ar/O$_2$ mixture, and power deposition and the dominant reaction pathways leading to VUV emission are identified and described. In general terms, absolute VUV emission intensities increase with power and oxygen fraction over the ranges investigated and peak emission intensities are found for pressures between 5-50 Pa. The emission is dominated by the 130 nm resonance line from the decay of the O(3s $^3$S$^0_1$) state to the ground state. Besides, at low pressure (0.3-1 Pa), the flux of VUV photons to surfaces is much lower than that of positive ions, whereas VUV fluxes dominate at higher pressure, $\gtrsim$5-50 Pa depending on O$_2$ fraction. Finally, oxygen atom fluxes to surfaces are, in general, larger than those of VUV photons for the parameter space investigated.
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Submitted 12 February, 2024;
originally announced February 2024.
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Interactions between flow fields induced by surface dielectric barrier discharge arrays
Authors:
Alexander Böddecker,
Maximilian Passmann,
Sebastian Wilczek,
Lars Schücke,
Ihor Korolov,
Romuald Skoda,
Thomas Mussenbrock,
Andrew R. Gibson,
Peter Awakowicz
Abstract:
This study investigates the flow field induced by a surface dielectric barrier discharge (SDBD) system, known for its efficient pollution remediation of volatile organic compounds (VOCs). We aim to understand the flow dynamics that contribute to the high conversion observed in similar systems. Experimental techniques, including schlieren imaging and particle image velocimetry (PIV), applied with h…
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This study investigates the flow field induced by a surface dielectric barrier discharge (SDBD) system, known for its efficient pollution remediation of volatile organic compounds (VOCs). We aim to understand the flow dynamics that contribute to the high conversion observed in similar systems. Experimental techniques, including schlieren imaging and particle image velocimetry (PIV), applied with high temporal resolution, were used to analyse the flow field. Complementary, fluid simulations are employed to investigate the coupling between streamer and gas dynamics. Results show distinct fluid field behaviours for different electrode configurations, which differ in geometric complexity. The fluid field analysis of the most basic electrode design revealed behaviours commonly observed in actuator studies. The simulation results indicate the local information about the electron density as well as different temporal phases of the fluid flow. The electrode design with mostly parallel grid line structures exhibits confined vortices near the surface. In contrast, an electrode design also used in previous studies, is shown to promote strong gas transport through extended vortex structures, enhancing gas mixing and potentially explaining the high conversion observed.
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Submitted 28 July, 2023;
originally announced July 2023.
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Electron dynamics in planar radio frequency magnetron plasmas: III. Comparison of experimental investigations of power absorption dynamics to simulation results
Authors:
Birk Berger,
Denis Eremin,
Moritz Oberberg,
Dennis Engel,
Christian Wölfel,
Quan-Zhi Zhang,
Peter Awakowicz,
Jan Lunze,
Ralf Peter Brinkmann,
Julian Schulze
Abstract:
In magnetized capacitively coupled radio-frequency discharges operated at low pressure the influence of the magnetic flux density on discharge properties has been studied recently both by experimental investigations and in simulations. It was found that the Magnetic Asymmetry Effect allows for a control of the DC self-bias and the ion energy distribution by tuning the magnetic field strength. In t…
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In magnetized capacitively coupled radio-frequency discharges operated at low pressure the influence of the magnetic flux density on discharge properties has been studied recently both by experimental investigations and in simulations. It was found that the Magnetic Asymmetry Effect allows for a control of the DC self-bias and the ion energy distribution by tuning the magnetic field strength. In this study, we focus on experimental investigations of the electron power absorption dynamics in the presence of a magnetron-like magnetic field configuration in a low pressure capacitive RF discharge operated in argon. Phase Resolved Optical Emission Spectroscopy measurements provide insights into the electron dynamics on a nanosecond-timescale. The magnetic flux density and the neutral gas pressure are found to strongly alter these dynamics. For specific conditions energetic electrons are efficiently trapped by the magnetic field in a region close to the powered electrode, serving as the target surface. Depending on the magnetic field strength an electric field reversal is observed that leads to a further acceleration of electrons during the sheath collapse. These findings are supported by 2-dimensional Particle in Cell simulations that yield deeper insights into the discharge dynamics.
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Submitted 10 November, 2022;
originally announced November 2022.
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Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the μ-mode
Authors:
Denis Eremin,
Dennis Engel,
Dennis Krüger,
Sebastian Wilczek,
Birk Berger,
Moritz Oberberg,
Christian Wölfel,
Andrei Smolyakov,
Jan Lunze,
Peter Awakowicz,
Julian Schulze,
Ralf Peter Brinkmann
Abstract:
The electron dynamics and the mechanisms of power absorption in radio-frequency (RF) driven, magnetically enhanced capacitively coupled plasmas (MECCPs) at low pressure are investigated. The device in focus is a geometrically asymmetric cylindrical magnetron with a radially nonuniform magnetic field in axial direction and an electric field in radial direction. The dynamics is studied analytically…
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The electron dynamics and the mechanisms of power absorption in radio-frequency (RF) driven, magnetically enhanced capacitively coupled plasmas (MECCPs) at low pressure are investigated. The device in focus is a geometrically asymmetric cylindrical magnetron with a radially nonuniform magnetic field in axial direction and an electric field in radial direction. The dynamics is studied analytically using the cold plasma model and a single-particle formalism, and numerically with the inhouse energy and charge conserving particle-in-cell/Monte Carlo collisions code ECCOPIC1S-M. It is found that the dynamics differs significantly from that of an unmagnetized reference discharge. In the magnetized region in front of the powered electrode, an enhanced electric field arises during sheath expansion and a reversed electric field during sheath collapse. Both fields are needed to ensure discharge sustaining electron transport against the confining effect of the magnetic field. The corresponding azimuthal ExB-drift can accelerate electrons into the inelastic energy range which gives rise to a new mechanism of RF power dissipation. It is related to the Hall current and is different in nature from Ohmic heating, as which it has been classified in previous literature. The new heating is expected to be dominant in many magnetized capacitively coupled discharges. It is proposed to term it the "μ-mode" to separate it from other heating modes.
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Submitted 9 November, 2022;
originally announced November 2022.
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Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code
Authors:
D. Eremin,
B. Berger,
D. Engel,
J. Kallähn,
K. Köhn,
D. Krüger,
L. Xu,
M. Oberberg,
C. Wölfel,
J. Lunze,
P. Awakowicz,
J. Schulze,
R. P. Brinkmann
Abstract:
The present work investigates electron transport and heating mechanisms using an (r, z) particle-in-cell (PIC) simulation of a typical rf-driven axisymmetric magnetron discharge with a conducting target. It is shown that for the considered magnetic field topology the electron current flows through different channels in the (r, z) plane: a ``transverse'' one, which involves current flow through the…
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The present work investigates electron transport and heating mechanisms using an (r, z) particle-in-cell (PIC) simulation of a typical rf-driven axisymmetric magnetron discharge with a conducting target. It is shown that for the considered magnetic field topology the electron current flows through different channels in the (r, z) plane: a ``transverse'' one, which involves current flow through the electrons' magnetic confinement region (EMCR) above the racetrack, and two ''longitudinal'' ones. Electrons gain energy from the electric field along these channels following various mechanisms, which are rather distinct from those sustaining dc-powered magnetrons. The longitudinal power absorption involves mirror-effect heating (MEH), nonlinear electron resonance heating (NERH), magnetized bounce heating (MBH), and the heating by the ambipolar field at the sheath-presheath interface. The MEH and MBH represent two new mechanisms missing from the previous literature. The MEH is caused by a reversed electric field needed to overcome the mirror force generated in a nonuniform magnetic field to ensure sufficient flux of electrons to the powered electrode, and the MBH is related to a possibility for an electron to undergo multiple reflections from the expanding sheath in the longitudinal channels connected by the arc-like magnetic field. The electron heating in the transverse channel is caused mostly by the essentially collisionless Hall heating in the EMCR above the racetrack, generating a strong ExB azimuthal drift velocity. The latter mechanism results in an efficient electron energization, i.e., energy transfer from the electric field to electrons in the inelastic range. Since the main electron population energized by this mechanism remains confined within the discharge for a long time, its contribution to the ionization processes is dominant.
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Submitted 7 November, 2022;
originally announced November 2022.
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Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements
Authors:
Michael Klute,
Efe Kemaneci,
Horia-Rugen Porteanu,
Ilija Stefanovic,
Wolfgang Heinrich,
Peter Awakowicz,
Ralf Peter Brinkmann
Abstract:
The MMWICP (Miniature MicroWave ICP) is a new plasma source using the induction principle. Recently Klute et al. presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitrogen, based on the chemical reaction set of Thorsteinsson and Gudmundsson and customized for the geo…
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The MMWICP (Miniature MicroWave ICP) is a new plasma source using the induction principle. Recently Klute et al. presented a mathematical model for the electromagnetic fields and power balance of the new device. In this work the electromagnetic model is coupled with a global chemistry model for nitrogen, based on the chemical reaction set of Thorsteinsson and Gudmundsson and customized for the geometry of the MMWICP. The combined model delivers a quantitative description for a non-thermal plasma at a pressure of $p=1000\,\mathrm{Pa}$ and a gas temperature of $T_\mathrm{g}=650\mbox{-}1600\,\mathrm{K}$. Comparison with published experimental data shows a good agreement for the volume averaged plasma parameters at high power, for the spatial distribution of the discharge and for the microwave measurements. Furthermore, the balance of capacitive and inductive \linebreak coupling in the absorbed power is analyzed. This leads to the interpretation of the discharge regime at a electron density of $n_\mathrm{e} \approx 6.4 \!\times\!10^{18} \, \mathrm{m}^{-3}$ as $E/H$-hybridmode with an capacitive and inductive component.
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Submitted 15 May, 2021;
originally announced May 2021.
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Computational study of simultaneous positive and negative streamer propagation in a twin surface dielectric barrier discharge via 2D PIC simulations
Authors:
Q. Zhang,
R. T. Nguyen-Smith,
F. Beckfeld,
Y. Liu,
T. Mussenbrock,
P. Awakowicz,
J. Schulze
Abstract:
The propagation mechanisms of plasma streamers have been observed and investigated in a surface dielectric barrier discharge (SDBD) using 2D particle in cell simulations. The investigations are carried out under a simulated air mixture, 80\% N$_2$ and 20\% O$_2$, at atmospheric pressure, 100$\,$kPa, under both DC conditions and a pulsed DC waveform that represent AC conditions. The simulated geome…
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The propagation mechanisms of plasma streamers have been observed and investigated in a surface dielectric barrier discharge (SDBD) using 2D particle in cell simulations. The investigations are carried out under a simulated air mixture, 80\% N$_2$ and 20\% O$_2$, at atmospheric pressure, 100$\,$kPa, under both DC conditions and a pulsed DC waveform that represent AC conditions. The simulated geometry is a simplification of the symmetric and fully exposed SDBD resulting in the simultaneous ignition of both positive and negative streamers on either side of the Al$_2$O$_3$ dielectric barrier. In order to determine the interactivity of the two streamers, the propagation behavior for the positive and negative streamers are investigated both independently and simultaneously under identical constant voltage conditions. An additional focus is implored under a fast sub nanosecond rise time square voltage pulse alternating between positive and negative voltage conditions, thus providing insight into the dynamics of the streamers under alternating polarity switches. It is shown that the simultaneous ignition of both streamers, as well as using the pulsed DC conditions, provides both an enhanced discharge and an increased surface coverage. It is also shown that additional streamer branching may occur in a cross section that is difficult to experimentally observe. The enhanced discharge and surface coverage may be beneficial to many applications such as, but are not limited to: air purification, volatile organic compound removal, and plasma enhanced catalysis.
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Submitted 18 February, 2021; v1 submitted 17 February, 2021;
originally announced February 2021.
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Theoretical investigation of a miniature microwave driven plasma jet
Authors:
Michael Klute,
Horia-Eugen Porteanu,
Ilija Stefanovic,
Wolfgang Heinrich,
Peter Awakowicz,
Ralf Peter Brinkmann
Abstract:
Microwave and radio frequency driven plasmas jets play an important role in many technical applications. They are usually operated in a capacitive mode known as E-mode. As a new plasma source the MMWICP (Miniature Micro Wave ICP) has been proposed, a small scale plasma jet with inductive coupling based on a specially designed resonator that acts as an LC-resonance circuit. This work presents a the…
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Microwave and radio frequency driven plasmas jets play an important role in many technical applications. They are usually operated in a capacitive mode known as E-mode. As a new plasma source the MMWICP (Miniature Micro Wave ICP) has been proposed, a small scale plasma jet with inductive coupling based on a specially designed resonator that acts as an LC-resonance circuit. This work presents a theoretical model of the new device, based on a series representation of the electromagnetic field in the resonator and the volume integrated (global) model for the loss processes within the plasma. An infinite number of modes can be found ordered by the azimuthal wave number m. These modes essentially determine the electromagnetic behavior of the system and differ from ordinary cavity modes. The mode m=0 can be identified with the inductive mode and is called H-mode, the mode m=1 is the capacitive mode and is called E-mode. Both modes refer to different operating regimes, which are separated by different values of the plasma parameters. In a second step the matching network and its characteristics are taken into account in order to find stable equilibrium points and possible hysteresis effects. As main result, the feasibility of inductive power coupling for the MMWICP resonator is shown.
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Submitted 6 March, 2020; v1 submitted 4 March, 2020;
originally announced March 2020.
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Inductively Coupled Plasma at Atmospheric Pressure, a Challenge for Miniature Devices
Authors:
Horia-Eugen,
Porteanu,
Ilija Stefanović,
Michael Klute,
Ralf-Peter Brinkmann,
Peter Awakowicz,
Wolfgang Heinrich
Abstract:
Plasma jets belong to the category remote plasma. This means that the discharge conditions and the chemical effect on samples can be tuned separately, this being a big advantage compared to standard low-pressure reactors. The inductive coupling brings the advantage of a pure and dense plasma. The microwave excitation allows furthermore miniaturization and generation of low temperature plasmas. The…
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Plasma jets belong to the category remote plasma. This means that the discharge conditions and the chemical effect on samples can be tuned separately, this being a big advantage compared to standard low-pressure reactors. The inductive coupling brings the advantage of a pure and dense plasma. The microwave excitation allows furthermore miniaturization and generation of low temperature plasmas. The present paper shows the state of the art of the research on such sources, demonstrating their work up to atmospheric pressure.
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Submitted 3 March, 2020;
originally announced March 2020.
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A global model of cylindrical and coaxial surface-wave discharges
Authors:
Efe Kemaneci,
Felix Mitschker,
Marcel Rudolph,
Daniel Szeremley,
Denis Eremin,
Peter Awakowicz,
Ralf Peter Brinkmann
Abstract:
A volume-averaged global model is developed to investigate surface-wave discharges inside either cylindrical or coaxial structures. The neutral and ion wall flux is self-consistently estimated based on a simplified analytical description both for electropositive and electronegative plasmas. The simulation results are compared with experimental data from various discharge setups of either argon or…
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A volume-averaged global model is developed to investigate surface-wave discharges inside either cylindrical or coaxial structures. The neutral and ion wall flux is self-consistently estimated based on a simplified analytical description both for electropositive and electronegative plasmas. The simulation results are compared with experimental data from various discharge setups of either argon or oxygen, measured or obtained from literature, for a continuous and a pulse-modulated power input. A good agreement is observed between the simulations and the measurements. The calculations show that the wall flux often substantially contributes to the net loss rates of the individual species.
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Submitted 21 December, 2016;
originally announced December 2016.
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Characterization of dielectric barrier discharge in air applying current measurement, numerical simulation and emission spectroscopy
Authors:
Priyadarshini Rajasekaran,
Nikita Bibinov,
Peter Awakowicz
Abstract:
Dielectric barrier discharge (DBD) in air is characterized applying current measurement, numerical simulation and optical emission spectroscopy (OES). For OES, a non-calibrated spectrometer is used. This diagnostic method is applicable when cross-sectional area of the active plasma volume and current density can be determined. The nitrogen emission in the spectral range of 380 nm- 406 nm is used f…
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Dielectric barrier discharge (DBD) in air is characterized applying current measurement, numerical simulation and optical emission spectroscopy (OES). For OES, a non-calibrated spectrometer is used. This diagnostic method is applicable when cross-sectional area of the active plasma volume and current density can be determined. The nitrogen emission in the spectral range of 380 nm- 406 nm is used for OES diagnostics. Electric field in the active plasma volume is determined applying the measured spectrum, well-known Frank-Condon factors for nitrogen transitions and numerically- simulated electron distribution functions. The measured electric current density is used for determination of electron density in plasma. Using the determined plasma parameters, the dissociation rate of nitrogen and oxygen in active plasma volume are calculated, which can be used by simulation of the chemical kinetics.
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Submitted 17 February, 2012;
originally announced February 2012.
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Characterization of transient discharges under atmospheric pressure conditions applying nitrogen photoemission and current measurements
Authors:
Sandra Keller,
Priyadarshini Rajasekaran,
Nikita Bibinov,
Peter Awakowicz
Abstract:
The plasma parameters such as electron distribution function and electron density of three atmospheric-pressure transient discharges namely filamentary and homogeneous dielectric barrier discharges in air, and the spark discharge of argon plasma coagulation (APC) system are determined. A combination of numerical simulation as well as diagnostic methods including current measurement and optical emi…
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The plasma parameters such as electron distribution function and electron density of three atmospheric-pressure transient discharges namely filamentary and homogeneous dielectric barrier discharges in air, and the spark discharge of argon plasma coagulation (APC) system are determined. A combination of numerical simulation as well as diagnostic methods including current measurement and optical emission spectroscopy (OES) based on nitrogen emissions is used. The applied methods supplement each other and resolve problems, which arise when these methods are used individually. Nitrogen is used as sensor gas and is admixed in low amount to argon for characterizing the APC discharge. Both direct and stepwise electron impact excitation of nitrogen emissions are included in the plasma-chemical model applied for characterization of these transient discharges using OES where ambiguity arises in the determination of plasma parameters at specific discharge conditions. It is shown that the measured current solves this problem by providing additional information useful for the determination of discharge-specific plasma parameters.
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Submitted 15 February, 2012; v1 submitted 26 September, 2011;
originally announced September 2011.
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Space-resolved characterization of high frequency atmospheric-pressure plasma in nitrogen applying optical emission spectroscopy and numerical simulation
Authors:
Priyadarshini Rajasekaran,
Cornelia Ruhrmann,
Nikita Bibinov,
Peter Awakowicz
Abstract:
Averaged plasma parameters such as electron distribution function and electron density are determined by characterization of high frequency (2.4 GHz) nitrogen-plasma using both experimental methods, namely optical emission spectroscopy (OES) and microphotography, and numerical simulation. Both direct and stepwise electron-impact excitation of nitrogen emissions are considered. The determination of…
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Averaged plasma parameters such as electron distribution function and electron density are determined by characterization of high frequency (2.4 GHz) nitrogen-plasma using both experimental methods, namely optical emission spectroscopy (OES) and microphotography, and numerical simulation. Both direct and stepwise electron-impact excitation of nitrogen emissions are considered. The determination of space-resolved electron distribution function, electron density, rate constant for electron-impact dissociation of nitrogen molecule and the production of nitrogen atoms, applying the same methods, is discussed. Spatial distribution of intensities of neutral nitrogen molecule and nitrogen molecular ion from the microplasma is imaged by a CCD camera. The CCD images are calibrated using the corresponding emissions measured by absolutely-calibrated OES, and are then subjected to inverse Abel transformation to determine space-resolved intensities and other parameters. The space-resolved parameters are compared, respectively, with the averaged parameters, and an agreement between them is established.
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Submitted 26 September, 2011;
originally announced September 2011.
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Amorphous carbon film deposition on inner surface of tubes using atmospheric pressure pulsed filamentary plasma source
Authors:
Ramasamy Pothiraja,
Nikita Bibinov,
Peter Awakowicz
Abstract:
Uniform amorphous carbon film is deposited on the inner surface of quartz tube having the inner diameter of 6 mm and the outer diameter of 8 mm. A pulsed filamentary plasma source is used for the deposition. Long plasma filaments (~ 140 mm) as a positive discharge are generated inside the tube in argon with methane admixture. FTIR-ATR, XRD, SEM, LSM and XPS analyses give the conclusion that deposi…
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Uniform amorphous carbon film is deposited on the inner surface of quartz tube having the inner diameter of 6 mm and the outer diameter of 8 mm. A pulsed filamentary plasma source is used for the deposition. Long plasma filaments (~ 140 mm) as a positive discharge are generated inside the tube in argon with methane admixture. FTIR-ATR, XRD, SEM, LSM and XPS analyses give the conclusion that deposited film is amorphous composed of non-hydrogenated sp2 carbon and hydrogenated sp3 carbon. Plasma is characterized using optical emission spectroscopy, voltage-current measurement, microphotography and numerical simulation. On the basis of observed plasma parameters, the kinetics of the film deposition process is discussed.
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Submitted 24 April, 2011;
originally announced April 2011.
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Fine-sorting One-dimensional Particle-In-Cell Algorithm with Monte-Carlo Collisions on a Graphics Processing Unit
Authors:
Philipp Mertmann,
Denis Eremin,
Thomas Mussenbrock,
Ralf Peter Brinkmann,
Peter Awakowicz
Abstract:
Particle-in-cell (PIC) simulations with Monte-Carlo collisions are used in plasma science to explore a variety of kinetic effects. One major problem is the long run-time of such simulations. Even on modern computer systems, PIC codes take a considerable amount of time for convergence. Most of the computations can be massively parallelized, since particles behave independently of each other within…
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Particle-in-cell (PIC) simulations with Monte-Carlo collisions are used in plasma science to explore a variety of kinetic effects. One major problem is the long run-time of such simulations. Even on modern computer systems, PIC codes take a considerable amount of time for convergence. Most of the computations can be massively parallelized, since particles behave independently of each other within one time step. Current graphics processing units (GPUs) offer an attractive means for execution of the parallelized code. In this contribution we show a one-dimensional PIC code running on Nvidia GPUs using the CUDA environment. A distinctive feature of the code is that size of the cells that the code uses to sort the particles with respect to their coordinates is comparable to size of the grid cells used for discretization of the electric field. Hence, we call the corresponding algorithm "fine-sorting". Implementation details and optimization of the code are discussed and the speed-up compared to classical CPU approaches is computed.
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Submitted 20 April, 2011;
originally announced April 2011.
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Spectroscopic characterization of atmospheric pressure um-jet plasma source
Authors:
Nikita Bibinov,
Nikolas Knake,
Hendrik Bahre,
Peter Awakowicz,
Volker Schulz-von der Gathen
Abstract:
A radio frequency um-jet plasma source is studied using He/O2 mixture. This um-jet can be used for different applications as a source of chemical active species e.g. oxygen atoms, molecular metastables and ozone. Using absolutely-calibrated optical emission spectroscopy and numerical simulation, the gas temperature in active plasma region and plasma parameters (electron density and electron distri…
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A radio frequency um-jet plasma source is studied using He/O2 mixture. This um-jet can be used for different applications as a source of chemical active species e.g. oxygen atoms, molecular metastables and ozone. Using absolutely-calibrated optical emission spectroscopy and numerical simulation, the gas temperature in active plasma region and plasma parameters (electron density and electron distribution function) are determined. Concentrations of oxygen atoms and ozone in the plasma channel and in the effluent of the plasma source are measured using emission and absorption spectroscopy. To interpret the measured spatial distributions, the steady-state species' concentrations are calculated using determined plasma parameters and gas temperature. At that the influence of the surface processes and gas flow regime on the loss of the active species in the plasma source are discussed. The measured spatial distributions of oxygen atom and ozone densities are compared with the simulated ones.
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Submitted 19 April, 2011;
originally announced April 2011.